A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon

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Authors
Simoen, Eddy; Gong, Chun; Posthuma, Niels; Van Kerschaver, Emmanuel; Poortmans, Jef; Mertens, Robert
Conference
218th ECS Meeting
Title
A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon
Publication type
Meeting abstract
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