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Surface nanopatterning of metals with low energy ion beam bombardment

dc.contributor.authorSkeren, Tomas
dc.contributor.authorVantomme, Andre
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T21:41:15Z
dc.date.available2021-10-18T21:41:15Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18000
dc.sourceIIOimport
dc.titleSurface nanopatterning of metals with low energy ion beam bombardment
dc.typeOral presentation
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Atomic Collisions in Solids
dc.source.conferencedate18/07/2010
dc.source.conferencelocationKrakow Poland
imec.availabilityPublished - imec


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