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Impact of plasma exposure on organic low-k materials

dc.contributor.authorSmirnov, Evgeny
dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorHuffman, Craig
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T21:43:00Z
dc.date.available2021-10-18T21:43:00Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18004
dc.sourceIIOimport
dc.titleImpact of plasma exposure on organic low-k materials
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage752107
dc.source.conferenceInternational Conference on Micro- and Nanoelectronics 2009
dc.source.conferencedate5/10/2009
dc.source.conferencelocationMoscow Russia
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 7521


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