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Altered layer formation in SiGe

dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T08:04:29Z
dc.date.available2021-09-30T08:04:29Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1803
dc.sourceIIOimport
dc.titleAltered layer formation in SiGe
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage529
dc.source.endpage532
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference
dc.source.conferencedate2/10/1995
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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