Light sensitive SiGe MEM resonator for detection and frequency tuning applications

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Authors
Stoffels, Steve; Severi, Simone; Van Hoof, Rita; Mertens, Robert; Puers, Bob; Witvrouw, Ann; Tilmans, Harrie
Conference
23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS
Title
Light sensitive SiGe MEM resonator for detection and frequency tuning applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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