Authors

Su, Jiale; Leonov, Vladimir; Goedbloed, Martijn; van Andel, Yvonne; de Nooijer, Christine; Elfrink, Rene; Wang, Ziyang; Vullers, Ruud

DOI

10.1088/0960-1317/20/10/104005

ISSN

0960-1317

Issue

10

Journal

Journal of Micromechanics and Microengineering

Volume

20

Title

A batch process micromachined thermoelectric energy harvester: fabrication and characterization

Publication type

Journal article