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A batch process micromachined thermoelectric energy harvester: fabrication and characterization

dc.contributor.authorSu, Jiale
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorElfrink, Rene
dc.contributor.authorWang, Ziyang
dc.contributor.authorVullers, Ruud
dc.date.accessioned2021-10-18T22:02:58Z
dc.date.available2021-10-18T22:02:58Z
dc.date.issued2010-10
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18048
dc.sourceIIOimport
dc.titleA batch process micromachined thermoelectric energy harvester: fabrication and characterization
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorde Nooijer, Christine
dc.contributor.imecauthorElfrink, Rene
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.identifier.doi10.1088/0960-1317/20/10/104005
dc.source.peerreviewyes
dc.source.beginpage104005
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue10
dc.source.volume20
imec.availabilityPublished - imec


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