Thermoelectric energy harvester fabricated by Stepper

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Authors

Su, Jiale; Vullers, Ruud; Goedbloed, Martijn; van Andel, Yvonne; Leonov, Vladimir; Wang, Ziyang

ISSN

0167-9317

Issue

5_8

Journal

Microelectronic Engineering

Volume

87

Title

Thermoelectric energy harvester fabricated by Stepper

Publication type

Journal article

Embargo date

9999-12-31

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