Thermoelectric energy harvester fabricated by Stepper
dc.contributor.author | Su, Jiale | |
dc.contributor.author | Vullers, Ruud | |
dc.contributor.author | Goedbloed, Martijn | |
dc.contributor.author | van Andel, Yvonne | |
dc.contributor.author | Leonov, Vladimir | |
dc.contributor.author | Wang, Ziyang | |
dc.date.accessioned | 2021-10-18T22:03:26Z | |
dc.date.available | 2021-10-18T22:03:26Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18049 | |
dc.source | IIOimport | |
dc.title | Thermoelectric energy harvester fabricated by Stepper | |
dc.type | Journal article | |
dc.contributor.imecauthor | Leonov, Vladimir | |
dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1242 | |
dc.source.endpage | 1244 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 5_8 | |
dc.source.volume | 87 | |
imec.availability | Published - open access | |
imec.internalnotes | MNE 2009 |