Authors

Suhard, Samuel; Claes, Martine; Civale, Yann; Nolmans, Philip; Sabuncuoglu Tezcan, Deniz; Travaly, Youssef

Conference

10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS

Title

ESH solvent for stripping positive and negative photoresists in 3D-WLP and 3D-SIC applications

Publication type

Meeting abstract

Embargo date

9999-12-31