dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Knotter, D. M. | |
dc.contributor.author | Kenis, Karine | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-09-30T08:04:47Z | |
dc.date.available | 2021-09-30T08:04:47Z | |
dc.date.issued | 1997 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1805 | |
dc.source | IIOimport | |
dc.title | Impact of iron contamination and SC1 generated roughness on 5nm gate oxides | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Kenis, Karine | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.conference | Productronica Conference : Semiconductor Equipment and Materials - Contamination Control and Defect Reductions; 11-14 November 1 | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |