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Compositional study of BaSrTiO thin films for memory application
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Authors
Tomida, Kazuyuki
;
Opsomer, Karl
;
Vrancken, Christa
;
Matero, Raija
;
Tois, Eva
;
Kaczer, Ben
;
Pawlak, Malgorzata
;
Popovici, Mihaela Ioana
;
Swerts, Johan
;
Van Elshocht, Sven
;
Detavernier, Christophe
;
Kim, Min-Soo
;
Debusschere, Ingrid
;
Altimime, Laith
;
Kittl, Jorge
Conference
41st IEEE Semiconductor Interface Specialists Conference - SISC
Title
Compositional study of BaSrTiO thin films for memory application
Publication type
Proceedings paper
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