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Conference contributions
Non-oxidizing solvent-based strip of ion implanted photoresist
Publication:
Non-oxidizing solvent-based strip of ion implanted photoresist
Date
2010
Meeting abstract
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21237.pdf
289.22 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tsvetanova, Diana
;
Vos, Rita
;
Vanstreels, Kris
;
Sonnemans, Roger
;
Berry, Ivan
;
Waldfried, Carlo
;
Mattson, David
;
DeLuca, J
;
Vereecke, Guy
;
Mertens, Paul
;
Parac-Vogt, Tatjana
;
Heyns, Marc
Journal
Abstract
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1921
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Citations
Metrics
Views
1921
since deposited on 2021-10-18
403
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations