Publication:

Dry etch solutions for 3D integration technology

Date

2010
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Author(s)

Tutunjyan, Nina  
;
Van Cauwenberghe, Marc  
;
Verdonck, Patrick  
;
Majeed, Bivragh  
;
Buisson, Thibault
;
Civale, Yann
;
Boullart, Werner  

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