dc.contributor.author | Urbanowicz, Adam | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-18T22:35:06Z | |
dc.date.available | 2021-10-18T22:35:06Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18117 | |
dc.source | IIOimport | |
dc.title | Improving mechanical robustness of ultra-low-k SiOCH PECVD materials | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.conference | 11th International Workshop on Stress-Induced Phenomena in Metallization | |
dc.source.conferencedate | 12/04/2010 | |
dc.source.conferencelocation | Dresden Germany | |
dc.identifier.url | http://www.malab.com/stress_workshop_2010/ | |
imec.availability | Published - imec | |