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Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening
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Authors
Urbanowicz, Adam
;
Vanstreels, Kris
;
Verdonck, Patrick
;
Shamiryan, Denis
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
ISSN
0021-8979
Issue
1
Journal
Journal of Applied Physics
Volume
107
Title
Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening
Publication type
Journal article
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