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Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening

dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorShamiryan, Denis
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T22:35:34Z
dc.date.available2021-10-18T22:35:34Z
dc.date.issued2010
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18118
dc.sourceIIOimport
dc.titleImproving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage104122
dc.source.journalJournal of Applied Physics
dc.source.issue1
dc.source.volume107
imec.availabilityPublished - imec


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