Authors

Uto, Atsushi; Sakuraba, Masao; Caymax, Matty; Murota, Junichi

Conference

5th International SiGe Technology and Device Meeting - ISTDM

Title

Evolution of the hydrogen terminated structure of the Si(100) surface and its interaction with H2 at 20 - 800°C

Publication type

Proceedings paper

Embargo date

9999-12-31