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Determination of the oxygen content in platelike and octahedral oxygen precipitates in silicon with FT-IR spectroscopy
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Authors
De Gryse, O.
;
Clauws, P.
;
Vanhellemont, Jan
;
Claeys, Cor
Conference
Defects in Semiconductors 19 - ICDS 19
Title
Determination of the oxygen content in platelike and octahedral oxygen precipitates in silicon with FT-IR spectroscopy
Publication type
Proceedings paper
Embargo date
9999-12-31
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