Electrochemical and analytical study of the Si etching
dc.contributor.author | Valckx, Nick | |
dc.date.accessioned | 2021-10-18T22:41:37Z | |
dc.date.available | 2021-10-18T22:41:37Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18132 | |
dc.source | IIOimport | |
dc.title | Electrochemical and analytical study of the Si etching | |
dc.type | Oral presentation | |
dc.source.peerreview | no | |
dc.source.conference | 10de Vlaams Jongerencongres van de Chemie - VJC | |
dc.source.conferencedate | 1/03/2010 | |
dc.source.conferencelocation | Blankenberge Belgium | |
imec.availability | Published - imec |
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