Membrane-less in-plane bulk-micromachined thermopiles for energy harvesting

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Authors

van Andel, Yvonne; Jambunathan, Madhusudhanan; Vullers, Ruud; Leonov, Vladimir

ISSN

0167-9317

Issue

5_8

Journal

Microelectronic Engineering

Volume

87

Title

Membrane-less in-plane bulk-micromachined thermopiles for energy harvesting

Publication type

Journal article

Embargo date

9999-12-31

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