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Membrane-less in-plane bulk-micromachined thermopiles for energy harvesting

dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorJambunathan, Madhusudhanan
dc.contributor.authorVullers, Ruud
dc.contributor.authorLeonov, Vladimir
dc.date.accessioned2021-10-18T22:44:58Z
dc.date.available2021-10-18T22:44:58Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18139
dc.sourceIIOimport
dc.titleMembrane-less in-plane bulk-micromachined thermopiles for energy harvesting
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1294
dc.source.endpage1296
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume87
imec.availabilityPublished - open access
imec.internalnotesMNE 2009


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