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Rare earth materials for semiconductor applications

dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorDelabie, Annelies
dc.contributor.authorNyns, Laura
dc.contributor.authorShi, Xiaoping
dc.contributor.authorTielens, Hilde
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSchram, Tom
dc.contributor.authorPierreux, Dieter
dc.contributor.authorMaes, Jan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T23:02:22Z
dc.date.available2021-10-18T23:02:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18176
dc.sourceIIOimport
dc.titleRare earth materials for semiconductor applications
dc.typeMeeting abstract
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage931
dc.source.conference217th ECS Meeting
dc.source.conferencedate25/04/2010
dc.source.conferencelocationVancouver Canada
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. 2010-01


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