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Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance

dc.contributor.authorVan Hoof, Rita
dc.contributor.authorBryce, George
dc.contributor.authorClaes, Gert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.date.accessioned2021-10-18T23:09:02Z
dc.date.available2021-10-18T23:09:02Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18191
dc.sourceIIOimport
dc.titleEnabling poly- SiGe MEMS scaling by improving anchor strength and resistance
dc.typeOral presentation
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewno
dc.source.conference36th International Conference on Micro and Nano Engineering - MNE
dc.source.conferencedate19/09/2010
dc.source.conferencelocationGenova Italy
imec.availabilityPublished - imec


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