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Towards the ultimate depth resolution limits in SIMS

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBerghmans, Bart
dc.contributor.authorVan Hove, N.
dc.contributor.authorKoelling, Sebastian
dc.date.accessioned2021-10-18T23:22:40Z
dc.date.available2021-10-18T23:22:40Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18220
dc.sourceIIOimport
dc.titleTowards the ultimate depth resolution limits in SIMS
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceThe International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University - SISS-12
dc.source.conferencedate10/06/2010
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - open access


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