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Dopant/carrier profiling in non-planar or textured structures

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDouhard, Bastien
dc.contributor.authorEyben, Pierre
dc.contributor.authorSeidel, F.
dc.contributor.authorHantschel, Thomas
dc.date.accessioned2021-10-18T23:23:07Z
dc.date.available2021-10-18T23:23:07Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18221
dc.sourceIIOimport
dc.titleDopant/carrier profiling in non-planar or textured structures
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceXIX International Materials Research Congress - IMRC
dc.source.conferencedate15/08/2010
dc.source.conferencelocationCancun Mexico
imec.availabilityPublished - open access


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