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Counting dopants/atoms in 2D/3D nanoscale structures

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorSchulze, Andreas
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorGilbert, Matthieu
dc.date.accessioned2021-10-18T23:23:35Z
dc.date.available2021-10-18T23:23:35Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18222
dc.sourceIIOimport
dc.titleCounting dopants/atoms in 2D/3D nanoscale structures
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.source.peerreviewno
dc.source.conferenceThe X International Conference on Nanostructured Materials - NANO-2010
dc.source.conferencedate13/09/2010
dc.source.conferencelocationRome Italy
imec.availabilityPublished - imec


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