Dopant/carrier profiling in nanostructures

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Authors
Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Mody, Jay; Koelling, Sebastian; Kambham, Ajay Kumar; Gilbert, Matthieu
Conference
International Conference on Solid State Devices and Materials - SSDM
Title
Dopant/carrier profiling in nanostructures
Publication type
Proceedings paper
Embargo date
9999-12-31
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