3D-Atomprobe : facts, artifacts and applications in semiconductors
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Koelling, Sebastian | |
dc.contributor.author | Gilbert, Matthieu | |
dc.contributor.author | Kambham, Ajay Kumar | |
dc.date.accessioned | 2021-10-18T23:24:31Z | |
dc.date.available | 2021-10-18T23:24:31Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18224 | |
dc.source | IIOimport | |
dc.title | 3D-Atomprobe : facts, artifacts and applications in semiconductors | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University - SISS-12 | |
dc.source.conferencedate | 10/06/2010 | |
dc.source.conferencelocation | Tokyo Japan | |
imec.availability | Published - open access |