Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Germanium doping of Si substrates for improved device characteristics and yield
Publication:
Germanium doping of Si substrates for improved device characteristics and yield
Copy permalink
Date
2010
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
20425.pdf
1.94 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Chen, J.
;
Xu, W.
;
Yang, D.
;
Rafi, J.M.
;
Ohyama, H.
;
Simoen, Eddy
Journal
Abstract
Description
Metrics
Views
1945
since deposited on 2021-10-18
1
last month
1
last week
Acq. date: 2026-01-10
Citations
Metrics
Views
1945
since deposited on 2021-10-18
1
last month
1
last week
Acq. date: 2026-01-10
Citations