Impact of Ge doping on Si substrate and diode characteristics

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Authors
Vanhellemont, Jan; Lauwaert, Johan; Chen, Jiiahe; Vrielinck, Henk; Rafi, Joan Marc; Ohyama, Hidenori; Simoen, Eddy; Yang, Deren
Conference
Materials for End-of-Roadmap Scaling of CMOS Devices
Title
Impact of Ge doping on Si substrate and diode characteristics
Publication type
Proceedings paper
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