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Modeling of bombardment induced oxidation of silicon with and without oxygen flooding

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.date.accessioned2021-09-30T08:07:27Z
dc.date.available2021-09-30T08:07:27Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1824
dc.sourceIIOimport
dc.titleModeling of bombardment induced oxidation of silicon with and without oxygen flooding
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSIMS XI; 8-12 September 1997; Orlando, Calif., USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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