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Defect investigation of aluminum-induced crystallized silicon thin-films grown on bare and oxidized silicon wafers

dc.contributor.authorVenkatachalam, Srisaran
dc.contributor.authorVan Gestel, Dries
dc.contributor.authorGordon, Ivan
dc.contributor.authorQiu, Yu
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T23:38:30Z
dc.date.available2021-10-18T23:38:30Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18254
dc.sourceIIOimport
dc.titleDefect investigation of aluminum-induced crystallized silicon thin-films grown on bare and oxidized silicon wafers
dc.typeMeeting abstract
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium I: Advanced Silicon Materials Research for Electronic and Photovoltaic Applications
dc.source.conferencedate7/06/2010
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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