dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Cirino, Giuseppe | |
dc.contributor.author | Mansano, Ronaldo | |
dc.contributor.author | Goncalves Neto, Luiz | |
dc.date.accessioned | 2021-10-18T23:41:42Z | |
dc.date.available | 2021-10-18T23:41:42Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18261 | |
dc.source | IIOimport | |
dc.title | Diffractive optical element applied to proximity exposure lithography exploring partial light coherence | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.source.peerreview | yes | |
dc.source.conference | Latin America Optics and Photonics Conference - LAOP | |
dc.source.conferencedate | 27/09/2010 | |
dc.source.conferencelocation | Recife Brazil | |
imec.availability | Published - imec | |