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Influence of the UV Cure on advanced PECVD low-k materials
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Authors
Verdonck, Patrick
;
Van Besien, Els
;
Trompoukis, Christos
;
Vanstreels, Kris
;
Urbanowicz, Adam
;
De Roest, David
;
Baklanov, Mikhaïl
Conference
Advanced Metallization Conference. 20th Aisan Session - ADMETA
Title
Influence of the UV Cure on advanced PECVD low-k materials
Publication type
Meeting abstract
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