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Compositional characterization of nickel silicides by HAADF-STEM imaging

dc.contributor.authorVerleysen, Eveline
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorSchryvers, Dominique
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T23:49:49Z
dc.date.available2021-10-18T23:49:49Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18278
dc.sourceIIOimport
dc.titleCompositional characterization of nickel silicides by HAADF-STEM imaging
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.conferenceE-MRS Symposium Q: Quantitative Electron Microscopy for Research and Industry
dc.source.conferencedate7/06/2010
dc.source.conferencelocationStrassbourg France
imec.availabilityPublished - imec


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