dc.contributor.author | Verleysen, Eveline | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Schryvers, Dominique | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-18T23:50:22Z | |
dc.date.available | 2021-10-18T23:50:22Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 1365-2818 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18279 | |
dc.source | IIOimport | |
dc.title | Characterization of nickel silicides using EELS-based methods | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.identifier.doi | 10.1111/j.1365-2818.2010.03391.x | |
dc.source.peerreview | no | |
dc.source.beginpage | 75 | |
dc.source.endpage | 82 | |
dc.source.journal | Journal of Microscopy | |
dc.source.issue | 1 | |
dc.source.volume | 240 | |
imec.availability | Published - imec | |