Authors

De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman

Conference

Proceedings of 8th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF 97; October 1997.

Title

A reliability study of titanium silicide lines using micro-Raman spectroscopy and electron microscopy

Publication type

Proceedings paper

Embargo date

9999-12-31