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Epitaxial growth of hexagonal theta-nickel silicide on (001) Si

dc.contributor.authorVerleysen, Eveline
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorSchryvers, Nick
dc.contributor.authorDe Keyser, Koen
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T23:50:52Z
dc.date.available2021-10-18T23:50:52Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18280
dc.sourceIIOimport
dc.titleEpitaxial growth of hexagonal theta-nickel silicide on (001) Si
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewyes
dc.source.conferenceInternational Microscopy Congress - IMC-17
dc.source.conferencedate19/09/2010
dc.source.conferencelocationRio de Janeiro Brazil
imec.availabilityPublished - imec


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