Show simple item record

Thermal ALD for industrial Si solar cells: advanced cleaning

dc.contributor.authorVermang, Bart
dc.contributor.authorRothschild, Aude
dc.contributor.authorBearda, Twan
dc.contributor.authorJohn, Joachim
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T23:52:18Z
dc.date.available2021-10-18T23:52:18Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18283
dc.sourceIIOimport
dc.titleThermal ALD for industrial Si solar cells: advanced cleaning
dc.typeMeeting abstract
dc.contributor.imecauthorVermang, Bart
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage206
dc.source.endpage207
dc.source.conference10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
dc.source.conferencedate19/09/2010
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - open access
imec.internalnotesP8.2


Files in this item

Thumbnail
Name:
21301.pdf
Size:
343.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record