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Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
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Authors
Vermang, Bart
;
Rothschild, Aude
;
Kenis, Karine
;
Wostyn, Kurt
;
Bearda, Twan
;
Racz, A.
;
Loozen, Xavier
;
John, Joachim
;
Mertens, Paul
;
Poortmans, Jef
;
Mertens, Robert
Conference
25th European Photovoltaic Solar Energy Conference - EPVSEC
Title
Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
Publication type
Proceedings paper
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