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ALD Al2O3 for industrial Si solar cells: advanced cleaning and in-depth characterization

dc.contributor.authorVermang, Bart
dc.contributor.authorRothschild, Aude
dc.contributor.authorLoozen, Xavier
dc.contributor.authorBearda, Twan
dc.contributor.authorCornagliotti, Emanuele
dc.contributor.authorJohn, Joachim
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T23:53:23Z
dc.date.available2021-10-18T23:53:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18285
dc.sourceIIOimport
dc.titleALD Al2O3 for industrial Si solar cells: advanced cleaning and in-depth characterization
dc.typeMeeting abstract
dc.contributor.imecauthorVermang, Bart
dc.contributor.imecauthorCornagliotti, Emanuele
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.conference35th IEEE Photovoltaic Specialists Conference
dc.source.conferencedate20/06/2010
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - imec


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