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High speed atmospheric pressure ALD for industrial scale solar cell passivation

dc.contributor.authorVermang, Bart
dc.contributor.authorRothschild, Aude
dc.contributor.authorRacz, A.
dc.contributor.authorJohn, Joachim
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.contributor.authorPoodt, P.
dc.contributor.authorTiba, V.
dc.contributor.authorRoozeboom, F.
dc.date.accessioned2021-10-18T23:53:55Z
dc.date.available2021-10-18T23:53:55Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18286
dc.sourceIIOimport
dc.titleHigh speed atmospheric pressure ALD for industrial scale solar cell passivation
dc.typeProceedings paper
dc.contributor.imecauthorVermang, Bart
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.beginpage1110
dc.source.endpage1113
dc.source.conference25th European Photovoltaic Solar Energy Conference and Exhibition - EPVSEC
dc.source.conferencedate6/09/2010
dc.source.conferencelocationValencia Spain
dc.identifier.urlhttp://www.photovoltaic-conference.com/
imec.availabilityPublished - imec


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