Authors

Vincent, Benjamin; Caymax, Matty; Vandervorst, Wilfried; Valev, Ventislav; Verbiest, Thierry; Loo, Roger

Conference

MRS Spring Meeting Symposium I: Materials for End-of Roadmap Scaling of CMOS Devices

Title

Ultimate Ge passivation: process and materials characterization of ultrathin Si cap layers grown on Ge substrates

Publication type

Meeting abstract