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Novel concepts for low-pressure, low-temperature nanodiamond growth using MW-linear antenna plasma sources

dc.contributor.authorVlcek, Jan
dc.contributor.authorFendrych, Frantisek
dc.contributor.authorTaylor, Andrew
dc.contributor.authorKratochvilova, Irena
dc.contributor.authorFekete, Ladislav
dc.contributor.authorNesladek, Milos
dc.contributor.authorLiehr, Michael
dc.date.accessioned2021-10-19T00:07:00Z
dc.date.available2021-10-19T00:07:00Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18312
dc.sourceIIOimport
dc.titleNovel concepts for low-pressure, low-temperature nanodiamond growth using MW-linear antenna plasma sources
dc.typeProceedings paper
dc.contributor.imecauthorNesladek, Milos
dc.source.peerreviewyes
dc.source.beginpage1203-J05-05
dc.source.conferenceDiamond Electronics and Bioelectronics - Fundamentals to Applications III
dc.source.conferencedate30/11/2009
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1203


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