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Conference contributions
Low weight spreading resistance profiling of ultra-shallow dopant profiles
Publication:
Low weight spreading resistance profiling of ultra-shallow dopant profiles
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Date
1997
Proceedings Paper
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1803.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Peter
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Hellemans, L.
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Abstract
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1913
since deposited on 2021-09-30
Acq. date: 2025-12-16
Citations
Metrics
Views
1913
since deposited on 2021-09-30
Acq. date: 2025-12-16
Citations