Growth of high quality InP layers in STI trenches on Si (001) substrates

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Authors
Wang, Gang; Nguyen, Duy; Leys, Maarten; Loo, Roger; Richard, Olivier; Brammertz, Guy; Dekoster, Johan; Meuris, Marc; Heyns, Marc; Caymax, Matty
Conference
15th International Conference on Metal Organic Vapor Phase Epitaxy - MOVPE
Title
Growth of high quality InP layers in STI trenches on Si (001) substrates
Publication type
Meeting abstract
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