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Design and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometer

dc.contributor.authorWen, Lianggong
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-19T00:23:25Z
dc.date.available2021-10-19T00:23:25Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18345
dc.sourceIIOimport
dc.titleDesign and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometer
dc.typeProceedings paper
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorPuers, Bob
dc.source.peerreviewno
dc.source.conferenceEurosensors XXIV
dc.source.conferencedate5/09/2010
dc.source.conferencelocationLinz Austria
imec.availabilityPublished - imec


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