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A comb based in-plane SiGe capacitive accelerometer for above-IC integration

dc.contributor.authorWen, Lianggong
dc.contributor.authorWouters, Kristof
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-19T00:23:54Z
dc.date.available2021-10-19T00:23:54Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18346
dc.sourceIIOimport
dc.titleA comb based in-plane SiGe capacitive accelerometer for above-IC integration
dc.typeProceedings paper
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorPuers, Bob
dc.source.peerreviewno
dc.source.beginpage212
dc.source.endpage215
dc.source.conference21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede The Netherlands
imec.availabilityPublished - imec


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