Show simple item record

EDA perspective on manufacturable DPT solutions

dc.contributor.authorWiaux, Vincent
dc.contributor.authorGao, Weimin
dc.contributor.authorLucas, Kevin
dc.contributor.authorCork, Chris
dc.contributor.authorLuk-Pat, Gerry
dc.contributor.authorMiloslavsky, Alex
dc.contributor.authorBarnes, L.
dc.contributor.authorPainter, B.
dc.contributor.authorLi, X.
dc.date.accessioned2021-10-19T00:25:23Z
dc.date.available2021-10-19T00:25:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18349
dc.sourceIIOimport
dc.titleEDA perspective on manufacturable DPT solutions
dc.typeOral presentation
dc.contributor.imecauthorWiaux, Vincent
dc.source.peerreviewno
dc.source.conference7th Annual LithoVision Technical Symposium
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesNikon Litho forum at SPIE Advanced Lithography Conference


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record